The most important trio temples are,
Melur Thiruvudai Amman,
Thiruvottiyur Vadivudai Amman
Thirumullaivayal Kadiyidai Amman
They are known as iccha, jnana and kriya sakthis
On Poornima days these temples are visited in the morning, afternoon, and evening in the order given to receive their full benefit.
Also, Kamakshi Amman at Kanchi is a form with all three gunas in her.
They are many but these three temples are ancient ones.
Kalikammanand at Parry's Corner
Mudakanniamman(Swayambhu)near Kutchery Rd. and kolavizhi Amman (goat-eyed) near Santhom, and many more.
These are famous and also ancient
Google the list will be numerous.